| Part | FLASH | SRAM | EEPROM | I/O pins | Max speed | Voltage range | T/C | Ext. intr. | Analog comp. | RC osc. | ADC | UART | SPI | Comments |
| AT90S1200 | 1K | No | 64 | 15 | 12 MHz | 2.7-6.0V | 1 8-bit | 1 | Yes | Yes | No | No | No | |
| AT90S2313 | 2K | 128 | 128 | 15 | 10 MHz | 2.7-6.0V | 1 8-bit, 1 16-bit | 2 | Yes | No | No | Yes | No | |
| AT90S2323 | 2K | 128 | 128 | 3 | 10 MHz | 4.0-6.0V | 1 8-bit | 1 | No | No | No | No | No | |
| AT90S2343 | 2K | 128 | 128 | 5 | 10 MHz | 4.0-6.0V | 1 8-bit | 1 | No | Yes | No | No | No | No XTAL osc. |
| AT90S2333 | 2K | 128 | 128 | 20 | 8 MHz | 4.0-6.0V | 1 8-bit, 1 16-bit | 2 | Yes | No | 6 channel,
10-bit |
Yes | Yes | Brown-out, enhanced POR |
| AT90S4433 | 4K | 256 | 128 | 20 | 8 MHz | 4.0-6.0V | 1 8-bit, 1 16-bit | 2 | Yes | No | 6 channel, 10-bit | Yes | Yes | Brown-out, enhanced POR |
| AT90S4434 | 4K | 256 | 256 | 32 | 8 MHz | 4.0-6.0V | 2 8-bit, 1 16-bit | 2 | Yes | No | 8 channel, 10-bit | Yes | Yes | RTC |
| AT90S8535 | 8K | 512 | 512 | 32 | 8 MHz | 4.0-6.0V | 2 8-bit, 1 16-bit | 2 | Yes | No | 8 channel, 10-bit | Yes | Yes | RTC |
| AT90C8534 | 8K | 256 | 512 | 7 | 1.5MHz | 3.3-6.0V | 1 8-bit, 1 16-bit | 2 | No | No | 6 channel, 10 bit | No | No | Low-power |
| AT90S4414 | 4K | 256 | 256 | 32 | 8 MHz (4.0-6.0V)
4 MHz (2.7-4.0V) |
2.7-6.0V | 1 8-bit, 1 16-bit | 2 | Yes | No | No | Yes | Yes | |
| AT90S8515 | 8K | 512 | 512 | 32 | 8 MHz (4.0-6.0V)
4 MHz (2.7-4.0V) |
2.7-6.0V | 1 8-bit, 1 16-bit | 2 | Yes | No | No | Yes | Yes | |
| ATmega103 | 128K | 4K | 4K | 32+8+8 | 6 MHz | 4.0-5.5V | 2 8-bit, 1 16-bit | 8 | Yes | No | 8 channel, 10-bit | Yes | Yes | RTC, XTAL divider |
| ATmega603 | 64K | 2K | 4K | 32+8+8 | 6 MHz | 4.0-5.5V | 2 8-bit, 1 16-bit | 8 | Yes | No | 8 channel, 10-bit | Yes | Yes | RTC, XTAL divider |
| ATmega161 | 16K | 1K | 512 | 35 | 8MHz | 4.0-5.5V | 1 16-bit, 2 8-bit | 2 | Yes | No | No | 2 | Yes | RTC, Self-programmable flash, MUL instruction |
| ATtiny10 | 1K | No | No | 5+1+0 | 6 MHz | 4.0-5.5V | 1 8-bit | 1 | Yes | No | No | No | No | QuickFlash |
| ATtiny11 | 1K | No | No | 5+1+0 | 6 MHz | 4.0-5.5V | 1 8-bit | 1 | Yes | No | No | No | No | No ISP |
| ATtiny12 | 1K | No | 64 | 6 | 8 MHz | 4.0-5.5V | 1 8-bit | 1 | Yes | Yes | No | No | No | Enhanced POR, internal calibrated RC osc. |
| ATtiny22 | 2K | 128 | 128 | 5 | 8 MHz | 4.0-6.0V | 1 8-bit | 1 | No | Yes | No | No | No |
The I/O lines is in the format : General I/O+Input+Output
LS versions (available for 2323, 2343, 4433, 4434, 8535) are the same
as S, except : Voltage range 2.7-6.0V, Max. speed 4 MHz.
L versions (available for mega103, mega603, mega161) are the same as the non-L
parts, except : Voltage range 2.7-3.6V (2.7-5.5 for mega161), Max. speed 4 MHz.
L versions (tiny10, tiny11, tiny12, tiny22) are the same as non-L parts,
except : Voltage range 2.7-5.5V (tiny10, tiny11, tiny12), 2.7-6.0V (tiny22) Max. speed 2 MHz
(tiny10, tiny11), 4 MHz (tiny12, tiny22).
V versions (tiny12) are the same as non-V parts,
except : Voltage range 1.8-5.5V, Max. speed 1 MHz.
All AVR parts have 32 registers, Watchdog timer and low-power modes (details vary).
All AVR parts without SRAM have a 3 entry HW stack
Note that parts marked QuickFlash do not have serial programming, all others can be programmed
via a 6-pin serial interface.